• Chromatic Confocal
• Non-Contact
• No Moving Parts
• Uses Proprietary Technology
• Production Ready & Easy to Use
• Variable Range/Resolution
• 5X to 100X Objectives
• Can Use CCD for Standard Machine Vision Tasks (X-Y & Z!)
• Tolerant of Tilt
• Vibration Tolerant
• High Sensitivity—Measures Glass as Easily as Mirrors

• Chromatic Confocal
• Non-Contact
• No Moving Parts
• Uses Proprietary Technology
• Production Ready & Easy to Use
• Variable Range/Resolution
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Thickness Measurements Calibrated to NIST-Traceable Gage Block

Any Wafer Thickness Can Be Measured Capacitance Sensors Have Limitations

Small Spot Size / High Spatial Resolution ~5 or 10µm

Patterned Wafers

• - Microscope/Vision Can Guide
• - Measurements Locations

Measurement includes:

• - Shape of Top Surface & Bottom Surface
• - Independent Measurements
• - Determine True Center-of-Wafer Surface
• - Bow and Warp Defined by Center-of-Wafer
• - Compare to Interferometers
• - Roughness

Transparent Tape, Glass Carriers, Photoresist, etc.